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Volume 6
Research & Reviews: Journal of Material Sciences
CrystalloPolySci 2018
November 19-20, 2018
Page 20
conference
series
.com
4
th
International Conference on
Crystallography & Novel Materials
&
9
th
International Conference on
Biopolymers & Polymer Sciences
November 19-20, 2018 Bucharest, Romania
Metal-silicon contact formation and role of the nanophase wetting layer
T
he result of the initial stages of the formation of a transition metal-silicon contact at room temperature has been analyzed.
The contact was formed by physical vapor deposition. At the growth stage preceding the formation of the first bulk phase
of the metal/silicide, a Nanophase Wetting Layer (NWL) of a metal/silicide on a silicon substrate was detected and identified.
The detection and identification of NWL was made possible by the technique developed by the author for complex analysis of
the structural-chemical and phase state of the surface/interface by Auger Electron Spectroscopy (AES) and Electron Energy
Loss Spectroscopy (EELS). In addition, this became possible to the development of the low-temperature method of Physical
Vapor Deposition (PVD) and the formation of metal-silicon contact by this method without mixing at the interface. The
detection of NWL fundamentally changed the approach to the formation of a metal contact with a silicon substrate.
Biography
Nikolay Plusnin is currently the Chief Researcher in the Institute of Automation and Control Processes of FEB of the RAS, Vladivostok, Russia. He has completed
his degree in Doctor of Physical-Mathematical Sciences. His research interests are in nanomaterials for electronics and their structure-phase analysis. He was
a Visiting Professor in Tohoku University, Sendai, Japan. Also, he is a Member of the Advisory Board of the international journal
e-journal of Surface Science
and Nanotechnology
. He has published more than 60 scientific articles. His research was supported by Russian Ministry of Education and Science, Academy of
Sciences and Government.
plusnin@iacp.dvo.ruNikolay Plusnin
FEB RAS-Institute of Automation and Control Processes, Russia
Nikolay Plusnin, Res. Rev. J Mat. Sci. 2018, Volume 6
DOI: 10.4172/2321-6212-C9-037